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Patents Grants
last 30 patents
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
7,726,323
Issue date
Jun 1, 2010
Lam Research AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
7,267,129
Issue date
Sep 11, 2007
Sez AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
7,007,702
Issue date
Mar 7, 2006
Sez AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
6,858,092
Issue date
Feb 22, 2005
Sez AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
6,435,200
Issue date
Aug 20, 2002
Sez Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for an etch treatment of a disk-like object
Patent number
6,328,846
Issue date
Dec 11, 2001
SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
Publication number
20080066865
Publication date
Mar 20, 2008
SEZ AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and process for liquid treatment of wafer-shaped articles
Publication number
20060144429
Publication date
Jul 6, 2006
SEZ AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and process for liquid treatment of wafer-shaped articles
Publication number
20040020427
Publication date
Feb 5, 2004
SEZ AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and process for liquid treatment of wafer-shaped articles
Publication number
20020148489
Publication date
Oct 17, 2002
SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLE
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS