Kurt Lehman

Person

San Mateo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-sensor tiled camera with flexible electronics for wafer inspe...
- Patent number 10,724,964
- Issue date Jul 28, 2020
- KLA-Tencor Corporation
- Pablo Pombo
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Integrated multi-channel analog front end and digitizer for high sp...
- Patent number 9,462,206
- Issue date Oct 4, 2016
- KLA-Tencor Coporation
- David L. Brown
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 8,831,767
- Issue date Sep 9, 2014
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated multi-channel analog front end and digitizer for high sp...
- Patent number 8,754,972
- Issue date Jun 17, 2014
- KLA-Tencor Corporation
- David L. Brown
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 8,010,222
- Issue date Aug 30, 2011
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 7,332,438
- Issue date Feb 19, 2008
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and systems for determining a characteristic of polishing w...
- Patent number 7,175,503
- Issue date Feb 13, 2007
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Environmental damage reduction
- Patent number 7,096,752
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Kurt R. Lehman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ metalization monitoring using eddy current measurements dur...
- Patent number 7,070,476
- Issue date Jul 4, 2006
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for detecting a presence of blobs on a specimen...
- Patent number 7,052,369
- Issue date May 30, 2006
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 7,030,018
- Issue date Apr 18, 2006
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and systems for generating a two-dimensional map of a chara...
- Patent number 6,935,922
- Issue date Aug 30, 2005
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ metalization monitoring using eddy current measurements dur...
- Patent number 6,885,190
- Issue date Apr 26, 2005
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for characterizing a polishing process
- Patent number 6,884,146
- Issue date Apr 26, 2005
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Windows configurable to be coupled to a process tool or to be dispo...
- Patent number 6,866,559
- Issue date Mar 15, 2005
- KLA Tencor Technologies
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ metalization monitoring using eddy current and optical meas...
- Patent number 6,707,540
- Issue date Mar 16, 2004
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for performing self-clearing optical measurem...
- Patent number 6,628,397
- Issue date Sep 30, 2003
- KLA Tencor
- Mehrdad Nikoonahad
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ metalization monitoring using eddy current measurements dur...
- Patent number 6,621,264
- Issue date Sep 16, 2003
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Grant
In-situ metalization monitoring using eddy current measurements dur...
- Patent number 6,433,541
- Issue date Aug 13, 2002
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Grant
Eddy current test method and apparatus for measuring conductance by...
- Patent number 5,552,704
- Issue date Sep 3, 1996
- Tencor Instruments
- Chester L. Mallory
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Integrated Multi-Channel Analog Front End And Digitizer For High Sp...
- Publication number 20140240562
- Publication date Aug 28, 2014
- KLA-Tencor Corporation
- David L. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Multi-Channel Analog Front End And Digitizer For High Sp...
- Publication number 20130194445
- Publication date Aug 1, 2013
- KLA-Tencor Corporation
- David L. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...
- Publication number 20110313558
- Publication date Dec 22, 2011
- KLA-Tencor Technologies Corporation
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...
- Publication number 20080207089
- Publication date Aug 28, 2008
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for detecting a presence of blobs on a specimen...
- Publication number 20060148383
- Publication date Jul 6, 2006
- KLA-Tencor Technologies.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for monitoring a parameter of a measurement dev...
- Publication number 20060131273
- Publication date Jun 22, 2006
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
In-situ metalization monitoring using eddy current measurements dur...
- Publication number 20050194971
- Publication date Sep 8, 2005
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Application
In-situ metalization monitoring using eddy current measurements dur...
- Publication number 20040189290
- Publication date Sep 30, 2004
- KLA-Tencor Corporation
- Kurt R. Lehman
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for detecting a presence of blobs on a specimen...
- Publication number 20030190864
- Publication date Oct 9, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for determining a characteristic of polishing w...
- Publication number 20030181138
- Publication date Sep 25, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for monitoring a parameter of a measurement dev...
- Publication number 20030180973
- Publication date Sep 25, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Systems and methods for characterizing a polishing process
- Publication number 20030181131
- Publication date Sep 25, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for generating a two-dimensional map of a chara...
- Publication number 20030181132
- Publication date Sep 25, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Windows configurable to be coupled to a process tool or to be dispo...
- Publication number 20030181139
- Publication date Sep 25, 2003
- Kurt Lehman
- B24 - GRINDING POLISHING

Kurt Lehman

Person

Patents Grantslast 30 patents

Multi-sensor tiled camera with flexible electronics for wafer inspe...

Integrated multi-channel analog front end and digitizer for high sp...

Methods and systems for monitoring a parameter of a measurement dev...

Integrated multi-channel analog front end and digitizer for high sp...

Methods and systems for monitoring a parameter of a measurement dev...

Methods and systems for monitoring a parameter of a measurement dev...

Methods and systems for determining a characteristic of polishing w...

Environmental damage reduction

In-situ metalization monitoring using eddy current measurements dur...

Methods and systems for detecting a presence of blobs on a specimen...

Methods and systems for monitoring a parameter of a measurement dev...

Methods and systems for generating a two-dimensional map of a chara...

In-situ metalization monitoring using eddy current measurements dur...

Systems and methods for characterizing a polishing process

Windows configurable to be coupled to a process tool or to be dispo...

In-situ metalization monitoring using eddy current and optical meas...

Apparatus and methods for performing self-clearing optical measurem...

In-situ metalization monitoring using eddy current measurements dur...

In-situ metalization monitoring using eddy current measurements dur...

Eddy current test method and apparatus for measuring conductance by...

Patents Applicationslast 30 patents

Integrated Multi-Channel Analog Front End And Digitizer For High Sp...

Integrated Multi-Channel Analog Front End And Digitizer For High Sp...

METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...

METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...

Methods and systems for detecting a presence of blobs on a specimen...

Methods and systems for monitoring a parameter of a measurement dev...

In-situ metalization monitoring using eddy current measurements dur...

In-situ metalization monitoring using eddy current measurements dur...

Methods and systems for detecting a presence of blobs on a specimen...

Methods and systems for determining a characteristic of polishing w...

Methods and systems for monitoring a parameter of a measurement dev...

Systems and methods for characterizing a polishing process

Methods and systems for generating a two-dimensional map of a chara...

Windows configurable to be coupled to a process tool or to be dispo...