Kurt W. Berger

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Reticle stage based linear dosimeter
- Patent number 7,196,771
- Issue date Mar 27, 2007
- EUV LLC
- Kurt W. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle stage based linear dosimeter
- Patent number 6,906,781
- Issue date Jun 14, 2005
- EUV LLC
- Kurt W. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Universal EUV in-band intensity detector
- Patent number 6,781,135
- Issue date Aug 24, 2004
- EUV, LLC
- Kurt W. Berger
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
EUV mirror based absolute incident flux detector
- Patent number 6,710,351
- Issue date Mar 23, 2004
- EUV, LLC
- Kurt W. Berger
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Reticle stage based linear dosimeter
- Publication number 20050206870
- Publication date Sep 22, 2005
- EUV LLC
- Kurt W. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Universal EUV in-band intensity detector
- Publication number 20040099808
- Publication date May 27, 2004
- Kurt W. Berger
- G01 - MEASURING TESTING
Information Patent Application
Reticle stage based linear dosimeter
- Publication number 20040067426
- Publication date Apr 8, 2004
- Kurt W. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV mirror based absolute incident flux detector
- Publication number 20030052275
- Publication date Mar 20, 2003
- Kurt W. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Application
Radiation flux monitor for EUV lithography
- Publication number 20020190642
- Publication date Dec 19, 2002
- Kurt W. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY