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Kurt Werder
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Multi-axis interferometer system using independent, single axis int...
Patent number
7,518,732
Issue date
Apr 14, 2009
William A. Eckes
G01 - MEASURING TESTING
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Patent Grant
Multi-axis interferometer system using independent, single axis int...
Patent number
7,336,369
Issue date
Feb 26, 2008
Applied Materials, Inc.
William A. Eckes
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
MULTI-AXIS INTERFEROMETER SYSTEM USING INDEPENDENT, SINGLE AXIS INT...
Publication number
20080043246
Publication date
Feb 21, 2008
WILLIAM A. ECKES
G01 - MEASURING TESTING
Information
Patent Application
Multi-axis interferometer system using independent, single axis int...
Publication number
20070076216
Publication date
Apr 5, 2007
APPLIED MATERIALS, INC.
William A. Eckes
G01 - MEASURING TESTING