Kurumi YAGI

Follow

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating method
- Patent number 10,424,496
- Issue date Sep 24, 2019
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including spin chuck
- Patent number 9,343,287
- Issue date May 17, 2016
- SCREEN Holdings Co., Ltd.
- Akiyoshi Nakano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20170372921
- Publication date Dec 28, 2017
- SCREEN Holdings Co., Ltd.
- Masafumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20150270145
- Publication date Sep 24, 2015
- SCREEN Holdings Co., Ltd.
- Masafumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140331927
- Publication date Nov 13, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Akiyoshi NAKANO
- H01 - BASIC ELECTRIC ELEMENTS