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Kwan Goo Rha
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Gyeonggi-do, KR
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for supporting substrate and plasma etching apparatus hav...
Patent number
8,980,049
Issue date
Mar 17, 2015
Charm Engineering Co., Ltd.
Won Haeng Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for plasma processing and method for plasma processing
Patent number
8,888,950
Issue date
Nov 18, 2014
Charm Engineering Co., Ltd.
Kyung Ho Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR SUPPORTING SUBSTRATE AND PLASMA ETCHING APPARATUS HAV...
Publication number
20100096084
Publication date
Apr 22, 2010
SOSUL CO LTD.
Won Haeng Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PLASMA PROCESSING AND METHOD FOR PLASMA PROCESSING
Publication number
20100059478
Publication date
Mar 11, 2010
Kyung Ho Lee
H01 - BASIC ELECTRIC ELEMENTS