Kwang-Ho Kwon

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Daejeon-city, KR

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Patents Grantslast 30 patents

Information Patent Grant
Device for producing inductively coupled plasma and method thereof
- Patent number 7,090,742
- Issue date Aug 15, 2006
- Kwang-Ho Kwon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA ETCHING APPARATUS, AND INDUCTIVELY COUPL...
- Publication number 20240055226
- Publication date Feb 15, 2024
- KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION, SEJONG CAMPUS
- Kwang Ho KWON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for producing inductively coupled plasma and method thereof
- Publication number 20050130450
- Publication date Jun 16, 2005
- Kwang-Ho KWON
- Kwang-Ho Kwon
- H01 - BASIC ELECTRIC ELEMENTS