Kwangpyo CHOI

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,347,676
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Yuichiro Wagatsuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device, and system for etching silicon oxide film
- Patent number 11,626,290
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Osamu Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230094053
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, DEVICE, AND SYSTEM FOR ETCHING SILICON OXIDE FILM
- Publication number 20220051901
- Publication date Feb 17, 2022
- TOKYO ELECTRON LIMITED
- Osamu YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS