Kwangyoub HEO

Person

Yongin-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Hollow cathode, an apparatus including a hollow cathode for manufac...
- Patent number 11,798,788
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,950,414
- Issue date Mar 16, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,522,332
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,347,468
- Issue date Jul 9, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20210057193
- Publication date Feb 25, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190279846
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190122860
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Method of Manufacturing Semiconduct...
- Publication number 20190122866
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20190122867
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND METHOD OF...
- Publication number 20190096636
- Publication date Mar 28, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki NAM
- H01 - BASIC ELECTRIC ELEMENTS

Kwangyoub HEO

Person

Patents Grantslast 30 patents

Hollow cathode, an apparatus including a hollow cathode for manufac...

Plasma processing apparatus and method of manufacturing semiconduct...

Plasma processing system, electron beam generator, and method of fa...

Plasma processing system, electron beam generator, and method of fa...

Patents Applicationslast 30 patents

HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

Plasma Processing Apparatus and Method of Manufacturing Semiconduct...

HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND METHOD OF...