Kye-hyun Baek

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated circuit device and method of forming the same
- Patent number 12,218,193
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Jae-hyun Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device and method of forming the same
- Patent number 11,211,450
- Issue date Dec 28, 2021
- Samsung Electronics Co., Ltd.
- Jae-hyun Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assemblies capable of bidirectional flow of coo...
- Patent number 9,912,258
- Issue date Mar 6, 2018
- Samsung Electronics Co., Ltd.
- Haejoong Park
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Methods and systems for managing semiconductor manufacturing equipment
- Patent number 9,870,900
- Issue date Jan 16, 2018
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, method of managing the same and method...
- Patent number 9,859,175
- Issue date Jan 2, 2018
- SAMSUNG ELECTRONICS CO., LTD.
- Kiwook Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment for manufacturing semiconductor device and seasoning proc...
- Patent number 9,136,138
- Issue date Sep 15, 2015
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- G05 - CONTROLLING REGULATING
Information Patent Grant
Etching system and method of controlling etching process condition
- Patent number 8,872,059
- Issue date Oct 28, 2014
- Samsung Electronics Co., Ltd.
- Sang-Wuk Park
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of controlling semiconductor process distribution
- Patent number 8,805,567
- Issue date Aug 12, 2014
- Samsung Electronics Co., Ltd.
- Ho-ki Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for optimizing a plasma process
- Patent number 8,741,164
- Issue date Jun 3, 2014
- Samsung Electronics Co., Ltd.
- Sangwuk Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using process-parameter prognostic system for predicting...
- Patent number 8,498,731
- Issue date Jul 30, 2013
- Samsung Electronics Co., Ltd.
- Kye-Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process-parameter prognostic system for predicting shape of semicon...
- Patent number 8,005,562
- Issue date Aug 23, 2011
- Samsung Electronics Co., Ltd.
- Kye-Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20220077285
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Jae-hyun Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20190280087
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- Jae-hyun Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20170047200
- Publication date Feb 16, 2017
- Samsung Electronics Co., Ltd.
- Hyung-Joo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING APPARATUS
- Publication number 20170032987
- Publication date Feb 2, 2017
- Samsung Electronics Co., Ltd.
- Hyung-Joo LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF MANAGING THE SAME AND METHOD...
- Publication number 20160372386
- Publication date Dec 22, 2016
- Samsung Electronics Co., Ltd.
- Kiwook SONG
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFER SYSTEM HAVING IONIZER
- Publication number 20160099086
- Publication date Apr 7, 2016
- Jae-Wook LEE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLIES CAPABLE OF BIDIRECTIONAL FLOW OF COO...
- Publication number 20160071755
- Publication date Mar 10, 2016
- Haejoong PARK
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Methods and Systems for Managing Semiconductor Manufacturing Equipment
- Publication number 20160035545
- Publication date Feb 4, 2016
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SHIELDING MEMBERS, PLASMA DETECTING STRUCTURES, AND PLASMA R...
- Publication number 20150114559
- Publication date Apr 30, 2015
- Eun-Young HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR OPTIMIZING A PLASMA PROCESS
- Publication number 20130052757
- Publication date Feb 28, 2013
- Samsung Electronics Co., Ltd.
- Sangwuk Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SEMICONDUCTOR PROCESS DISTRIBUTION
- Publication number 20120150330
- Publication date Jun 14, 2012
- Ho-Ki LEE
- G05 - CONTROLLING REGULATING
Information Patent Application
ETCHING SYSTEM AND METHOD OF CONTROLLING ETCHING PROCESS CONDITION
- Publication number 20120055908
- Publication date Mar 8, 2012
- Samsung Electronics Co., Ltd.
- Sang-Wuk Park
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF USING PROCESS-PARAMETER PROGNOSTIC SYSTEM FOR PREDICTING...
- Publication number 20110320027
- Publication date Dec 29, 2011
- Kye-Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment For Manufacturing Semiconductor Device And Seasoning Proc...
- Publication number 20110295554
- Publication date Dec 1, 2011
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA APPARATUS HAVING A CONTROLLER FOR CONTROLLING A PLASMA CHAMB...
- Publication number 20110215072
- Publication date Sep 8, 2011
- Sangwuk PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MONITORING SEMICONDUCTOR PROCESS
- Publication number 20110140719
- Publication date Jun 16, 2011
- SAMSUNG ELECTRONICS CO., LTD.
- HO-KI LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Selecting Sensors for Detecting Abnormalities in Semicon...
- Publication number 20100262398
- Publication date Oct 14, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Kye-Hyun Baek
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESS-PARAMETER PROGNOSTIC SYSTEM FOR PREDICTING SHAPE OF SEMICON...
- Publication number 20090105853
- Publication date Apr 23, 2009
- SAMSUNG ELECTRONICS CO., LTD.
- Kye-Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning apparatus for cleaning a chamber used in manufacturing a s...
- Publication number 20080035170
- Publication date Feb 14, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Kye-Hyun Baek
- B08 - CLEANING
Information Patent Application
Method of processing semiconductor substrate responsive to a state...
- Publication number 20070020780
- Publication date Jan 25, 2007
- Kye-Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS

Kye-hyun Baek

Person

Patents Grantslast 30 patents

Integrated circuit device and method of forming the same

Integrated circuit device and method of forming the same

Electrostatic chuck assemblies capable of bidirectional flow of coo...

Methods and systems for managing semiconductor manufacturing equipment

Substrate processing system, method of managing the same and method...

Equipment for manufacturing semiconductor device and seasoning proc...

Etching system and method of controlling etching process condition

Method of controlling semiconductor process distribution

Methods for optimizing a plasma process

Method of using process-parameter prognostic system for predicting...

Process-parameter prognostic system for predicting shape of semicon...

Patents Applicationslast 30 patents

INTEGRATED CIRCUIT DEVICE AND METHOD OF FORMING THE SAME

INTEGRATED CIRCUIT DEVICE AND METHOD OF FORMING THE SAME

Plasma Processing Apparatus

DRY ETCHING APPARATUS

SUBSTRATE PROCESSING SYSTEM, METHOD OF MANAGING THE SAME AND METHOD...

SUBSTRATE TRANSFER SYSTEM HAVING IONIZER

ELECTROSTATIC CHUCK ASSEMBLIES CAPABLE OF BIDIRECTIONAL FLOW OF COO...

Methods and Systems for Managing Semiconductor Manufacturing Equipment

PLASMA SHIELDING MEMBERS, PLASMA DETECTING STRUCTURES, AND PLASMA R...

METHODS FOR OPTIMIZING A PLASMA PROCESS

METHOD OF CONTROLLING SEMICONDUCTOR PROCESS DISTRIBUTION

ETCHING SYSTEM AND METHOD OF CONTROLLING ETCHING PROCESS CONDITION

METHOD OF USING PROCESS-PARAMETER PROGNOSTIC SYSTEM FOR PREDICTING...

Equipment For Manufacturing Semiconductor Device And Seasoning Proc...

PLASMA APPARATUS HAVING A CONTROLLER FOR CONTROLLING A PLASMA CHAMB...

METHOD OF MONITORING SEMICONDUCTOR PROCESS

Methods of Selecting Sensors for Detecting Abnormalities in Semicon...

PROCESS-PARAMETER PROGNOSTIC SYSTEM FOR PREDICTING SHAPE OF SEMICON...

Cleaning apparatus for cleaning a chamber used in manufacturing a s...

Method of processing semiconductor substrate responsive to a state...