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Kyeong Tae Lee
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High lateral to vertical ratio etch process for device manufacturing
Patent number
11,031,233
Issue date
Jun 8, 2021
Applied Materials, Inc.
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High lateral to vertical ratio etch process for device manufacturing
Patent number
10,460,921
Issue date
Oct 29, 2019
Applied Materials, Inc.
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods to eliminate “M-shape” etch rate profile in inductively cou...
Patent number
8,956,500
Issue date
Feb 17, 2015
Applied Materials, Inc.
Stephen Yuen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High lateral to vertical ratio etch process for device manufacturing
Patent number
8,529,776
Issue date
Sep 10, 2013
Applied Materials, Inc.
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-plasma system with pulsed reaction gas replenish for etching...
Patent number
7,771,606
Issue date
Aug 10, 2010
Applied Materials, Inc.
Tae Won Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for etching tungsten silicide overlying polysilicon particu...
Patent number
7,754,610
Issue date
Jul 13, 2010
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-plasma system for etching semiconductor structures
Patent number
7,737,042
Issue date
Jun 15, 2010
Applied Materials, Inc.
Tae Won Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-plasma system with pulsed sample bias for etching semiconduc...
Patent number
7,718,538
Issue date
May 18, 2010
Applied Materials, Inc.
Tae Won Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating a gate structure of a field effect transistor...
Patent number
7,368,392
Issue date
May 6, 2008
Applied Materials, Inc.
Jinhan Choi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ASH RATE RECOVERY METHOD IN PLASMA STRIP CHAMBER
Publication number
20220293395
Publication date
Sep 15, 2022
Applied Materials, Inc.
Yongkwan KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH LATERAL TO VERTICAL RATIO ETCH PROCESS FOR DEVICE MANUFACTURING
Publication number
20200013610
Publication date
Jan 9, 2020
Applied Materials, Inc.
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH LATERAL TO VERTICAL RATIO ETCH PROCESS FOR DEVICE MANUFACTURING
Publication number
20130319614
Publication date
Dec 5, 2013
Applied Materials, Inc.
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH LATERAL TO VERTICAL RATIO ETCH PROCESS FOR DEVICE MANUFACTURING
Publication number
20130029490
Publication date
Jan 31, 2013
Kyeong Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS TO ELIMINATE "M-SHAPE" ETCH RATE PROFILE IN INDUCTIVELY COU...
Publication number
20080264904
Publication date
Oct 30, 2008
STEPHEN YUEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-PLASMA SYSTEM FOR ETCHING SEMICONDUCTOR STRUCTURES
Publication number
20080206900
Publication date
Aug 28, 2008
TAE WON KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-PLASMA SYSTEM WITH PULSED REACTION GAS REPLENISH FOR ETCHING...
Publication number
20080206901
Publication date
Aug 28, 2008
TAE WON KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-PLASMA SYSTEM WITH PULSED SAMPLE BIAS FOR ETCHING SEMICONDUC...
Publication number
20080197110
Publication date
Aug 21, 2008
Tae Won Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for etching tungsten silicide overlying polysilicon particu...
Publication number
20070281477
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process including silo-chloro passivation for etching tungsten sili...
Publication number
20070281479
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating a gate structure of a field effect transistor...
Publication number
20050009358
Publication date
Jan 13, 2005
APPLIED MATERIALS, INC.
Jinhan Choi
H01 - BASIC ELECTRIC ELEMENTS