Kyle Miller

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Oswego, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for copper CMP using polymeric complexing agents
- Patent number 6,821,897
- Issue date Nov 23, 2004
- Cabot Microelectronics Corporation
- David J. Schroeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for copper CMP using polymeric complexing agents
- Publication number 20030124959
- Publication date Jul 3, 2003
- Cabot Microelectronics Corporation
- David J. Schroeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...