Kyo OTSUBO

Person

Shinagawa Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning substrate and substrate processing apparatus
- Patent number 11,264,233
- Issue date Mar 1, 2022
- Kioxia Corporation
- Kyo Otsubo
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,185,895
- Issue date Nov 30, 2021
- TOSHIBA MEMORY CORPORATION
- Mana Tanabe
- B08 - CLEANING
Information Patent Grant
Freeze cleaning apparatus
- Patent number 10,882,082
- Issue date Jan 5, 2021
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- B08 - CLEANING
Information Patent Grant
Method for cleaning substrate and substrate processing apparatus
- Patent number 10,692,715
- Issue date Jun 23, 2020
- TOSHIBA MEMORY CORPORATION
- Kyo Otsubo
- B08 - CLEANING
Information Patent Grant
Substrate production method, substrate processing apparatus, and su...
- Patent number 10,486,203
- Issue date Nov 26, 2019
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
EVALUATION APPARATUS AND EVALUATION METHOD
- Publication number 20240280459
- Publication date Aug 22, 2024
- KIOXIA Corporation
- Yusuke OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20200321212
- Publication date Oct 8, 2020
- Toshiba Memory Corporation
- Minako INUKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200279731
- Publication date Sep 3, 2020
- Toshiba Memory Corporation
- Kyo Otsubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FREEZE CLEANING APPARATUS
- Publication number 20200156121
- Publication date May 21, 2020
- Toshiba Memory Corporation
- Hideaki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20200078834
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FREEZE CLEANING APPARATUS
- Publication number 20180272391
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Hideaki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180047566
- Publication date Feb 15, 2018
- Toshiba Memory Corporation
- Kyo OTSUBO
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20180047565
- Publication date Feb 15, 2018
- Toshiba Memory Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PRODUCTION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20170274427
- Publication date Sep 28, 2017
- Kabushiki Kaisha Toshiba
- Hideaki SAKURAI
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Method for cleaning substrate and substrate processing apparatus

Substrate processing method, substrate processing apparatus, and co...

Freeze cleaning apparatus

Method for cleaning substrate and substrate processing apparatus

Substrate production method, substrate processing apparatus, and su...

Patents Applicationslast 30 patents

EVALUATION APPARATUS AND EVALUATION METHOD

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

FREEZE CLEANING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

FREEZE CLEANING APPARATUS

METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

SUBSTRATE PRODUCTION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SU...