Kyo-Woog Koo

Person

Chungcheongnam-do, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate dryer using supercritical fluid, apparatus including the...
- Patent number 8,898,926
- Issue date Dec 2, 2014
- Semes Co. Ltd
- Jung Keun Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for loading and unloading...
- Patent number 8,738,174
- Issue date May 27, 2014
- Semes Co., Ltd.
- Jaehyun You
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for treating substrate
- Patent number 8,721,834
- Issue date May 13, 2014
- Semes Co., Ltd.
- Kyo-Woog Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning substrates
- Patent number 8,267,103
- Issue date Sep 18, 2012
- Semes Co. Ltd
- Keun-Young Park
- B08 - CLEANING
Information Patent Grant
Chucking member and spin head and method for chucking substrate usi...
- Patent number 8,256,774
- Issue date Sep 4, 2012
- Semes Co., Ltd.
- Jung Keun Cho
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 8,122,899
- Issue date Feb 28, 2012
- Semes Co., Ltd.
- Kyo-Woog Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin head, method of operating the spin head and apparatus for trea...
- Patent number 8,038,838
- Issue date Oct 18, 2011
- Semes Co., Ltd.
- Ju Won Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Facility with multi-storied process chamber for cleaning substrates...
- Patent number 7,934,513
- Issue date May 3, 2011
- Semes Co., Ltd.
- Joung-Hyeon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unit for eliminating particles and apparatus for transferring a sub...
- Patent number 7,918,910
- Issue date Apr 5, 2011
- Semes Co., Ltd.
- Young-Ki Ahn
- B08 - CLEANING
Information Patent Grant
Apparatus for supplying chemical liquid
- Patent number 7,900,853
- Issue date Mar 8, 2011
- Semes Co., Ltd.
- Si-Eun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrates
- Patent number 7,802,579
- Issue date Sep 28, 2010
- Semes Co., Ltd.
- Hyun-Jong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning and drying substrates
- Patent number 7,637,272
- Issue date Dec 29, 2009
- Semes Co., Ltd.
- Jung-Keun Cho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20130081658
- Publication date Apr 4, 2013
- SEMES CO., LTD.
- Gil Hun SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus And Method For Loading And Unloading...
- Publication number 20110313565
- Publication date Dec 22, 2011
- SEMES CO., LTD.
- Jaehyun Yoo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Thin Film Deposition Apparatus
- Publication number 20110308458
- Publication date Dec 22, 2011
- SEMES CO., LTD.
- Bo Ramchan Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SUPPLYING CHEMICAL LIQUID
- Publication number 20090120468
- Publication date May 14, 2009
- Semes Co., LTD.
- Si-Eun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Unit for Eliminating Particles and Apparatus for Transferring a Sub...
- Publication number 20090071112
- Publication date Mar 19, 2009
- Young-Ki Ahn
- B08 - CLEANING
Information Patent Application
SPIN HEAD, METHOD OF OPERATING THE SPIN HEAD AND APPARATUS FOR TREA...
- Publication number 20080127888
- Publication date Jun 5, 2008
- Ju Won Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chucking member and spin head and method for chucking substrate usi...
- Publication number 20080061519
- Publication date Mar 13, 2008
- Semes Co., LTD.
- Jung Keun Cho
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate dryer using supercritical fluid, apparatus including the...
- Publication number 20080063493
- Publication date Mar 13, 2008
- Jung Keun Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for treating substrates
- Publication number 20080057219
- Publication date Mar 6, 2008
- Hyun-Jong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for treating substrate
- Publication number 20080014358
- Publication date Jan 17, 2008
- Kyo-Woog Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning substrates
- Publication number 20070283983
- Publication date Dec 13, 2007
- Keun-Young Park
- B08 - CLEANING
Information Patent Application
Facility with Multi-Storied Process Chamber for Cleaning Substrates...
- Publication number 20070224820
- Publication date Sep 27, 2007
- Joung-Hyeon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for treating substrate
- Publication number 20070163711
- Publication date Jul 19, 2007
- Kyo-Woog Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning and drying substrates
- Publication number 20060266386
- Publication date Nov 30, 2006
- Semes Co., LTD.
- Jung-Keun Cho
- H01 - BASIC ELECTRIC ELEMENTS

Kyo-Woog Koo

Person

Patents Grantslast 30 patents

Substrate dryer using supercritical fluid, apparatus including the...

Substrate processing apparatus and method for loading and unloading...

Apparatus for treating substrate

Method and apparatus for cleaning substrates

Chucking member and spin head and method for chucking substrate usi...

Apparatus and method for treating substrate

Spin head, method of operating the spin head and apparatus for trea...

Facility with multi-storied process chamber for cleaning substrates...

Unit for eliminating particles and apparatus for transferring a sub...

Apparatus for supplying chemical liquid

Apparatus and method for treating substrates

Method and apparatus for cleaning and drying substrates

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR TREATING SUBSTRATE

Substrate Processing Apparatus And Method For Loading And Unloading...

Thin Film Deposition Apparatus

APPARATUS FOR SUPPLYING CHEMICAL LIQUID

Unit for Eliminating Particles and Apparatus for Transferring a Sub...

SPIN HEAD, METHOD OF OPERATING THE SPIN HEAD AND APPARATUS FOR TREA...

Chucking member and spin head and method for chucking substrate usi...

Substrate dryer using supercritical fluid, apparatus including the...

Apparatus and method for treating substrates

Apparatus and method for treating substrate

Method and apparatus for cleaning substrates

Facility with Multi-Storied Process Chamber for Cleaning Substrates...

Apparatus for treating substrate

Method and apparatus for cleaning and drying substrates