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Kyohei NOGUCHI
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Yamanashi, JP
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last 30 patents
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Patent Grant
Substrate processing method and recording medium
Patent number
10,242,878
Issue date
Mar 26, 2019
Tokyo Electron Limited
Tomonari Urano
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20240203694
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Takuji SAKO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
Publication number
20170250086
Publication date
Aug 31, 2017
Tomonari URANO
H01 - BASIC ELECTRIC ELEMENTS