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Kyoichi Inaki
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Tokorozawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Quartz glass body having improved resistance against plasma corrosi...
Patent number
RE41249
Issue date
Apr 20, 2010
Heraeus Quarzglas GmbH & Co. KG
Tatsuhiro Sato
428 - Stock material or miscellaneous articles
Information
Patent Grant
Member for plasma etching device and method for manufacture thereof
Patent number
7,645,526
Issue date
Jan 12, 2010
Shin-Etsu Quartz Products, Ltd.
Kyoichi Inaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quartz glass body having improved resistance against plasma corrosi...
Patent number
6,887,576
Issue date
May 3, 2005
Herseus Quarzglas GmbH & Co. KG
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Quartz glass jig for processing apparatus using plasma
Patent number
6,869,898
Issue date
Mar 22, 2005
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Fluororesin-coated quartz glass jig and method for producing the same
Patent number
6,723,386
Issue date
Apr 20, 2004
Heraens Quaraglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Plasma resistant quartz glass jig
Patent number
6,680,455
Issue date
Jan 20, 2004
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Quartz glass member for use in dry etching and dry etching system e...
Patent number
6,514,582
Issue date
Feb 4, 2003
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Quartz glass jig having large irregularities on the surface and met...
Patent number
6,458,445
Issue date
Oct 1, 2002
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
High purity opaque silica glass
Patent number
5,977,000
Issue date
Nov 2, 1999
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Method of producing cristobalite containing silica glass
Patent number
5,876,473
Issue date
Mar 2, 1999
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Process for producing opaque silica glass
Patent number
5,772,714
Issue date
Jun 30, 1998
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Optical member of synthetic quartz glass for excimer lasers and met...
Patent number
5,523,266
Issue date
Jun 4, 1996
Shin-Etsu Quartz Products Company Limited
Hiroyuki Nishimura
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Optical member made of high-purity and transparent synthetic silica...
Patent number
5,410,428
Issue date
Apr 25, 1995
Shin-Etsu Quartz Products Co. Ltd.
Shigeru Yamagata
G02 - OPTICS
Information
Patent Grant
Optical member of synthetic quartz glass for excimer lasers and met...
Patent number
5,364,433
Issue date
Nov 15, 1994
Shin-Etsu Quartz Products Company Limited
Hiroyuki Nishimura
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Optical members and blanks of synthetic silica glass and method for...
Patent number
5,325,230
Issue date
Jun 28, 1994
Shin-Etsu Quartz Products Co., Ltd.
Shigeru Yamagata
G02 - OPTICS
Information
Patent Grant
Optical members and blanks or synthetic silica glass and method for...
Patent number
5,086,352
Issue date
Feb 4, 1992
Shin-Etsu Quartz Products Co., Ltd.
Shigeru Yamagata
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
SILICA GLASS DISC HAVING DIMPLES FORMED THEREON
Publication number
20220402812
Publication date
Dec 22, 2022
Shin-Etsu Quartz Products Co., Ltd.
Kyoichi INAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUARTZ GLASS MEMBER FOR PLASMA ETCHING
Publication number
20110232847
Publication date
Sep 29, 2011
Heraeus Quarzglas GmbH & Co. KG
Tatsuhiro Sato
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Member for plasma etching device and method for manufacture thereof
Publication number
20080241412
Publication date
Oct 2, 2008
Shin-Etsu Quartz Products Co., Ltd.
Kyoichi Inaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Member for plasma etching device and method for manufacture thereof
Publication number
20060172544
Publication date
Aug 3, 2006
Kyoichi Inaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20040050102
Publication date
Mar 18, 2004
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for producing a quartz glass tank for use in ultrasonic clea...
Publication number
20040023510
Publication date
Feb 5, 2004
Kyoichi Inaki
B08 - CLEANING
Information
Patent Application
Quartz glass jig for processing apparatus using plasma
Publication number
20030190483
Publication date
Oct 9, 2003
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Fluororesin-coated quartz glass jig and method for producing the same
Publication number
20020106518
Publication date
Aug 8, 2002
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20020078886
Publication date
Jun 27, 2002
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quartz glass body having improved resistance against plasma corrosi...
Publication number
20020076559
Publication date
Jun 20, 2002
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Plasma resistant quartz glass jig
Publication number
20020046992
Publication date
Apr 25, 2002
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL