-
Positive resist composition
-
Patent number 5,468,590
-
Issue date Nov 21, 1995
-
Sumitomo Chemical Company, Limited
-
Kazuhiko Hashimoto
-
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
-
Positive resist composition
-
Patent number 5,451,484
-
Issue date Sep 19, 1995
-
Sumitomo Chemical Company, Ltd.
-
Kyoko Nagase
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
-
Positive resist composition
-
Patent number 5,429,904
-
Issue date Jul 4, 1995
-
Sumitomo Chemical Company, Ltd.
-
Kyoko Nagase
-
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...