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Kyoko Oshita
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Kawasaki, JP
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last 30 patents
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Patent Grant
Polymer compound, positive resist composition, and method of formin...
Patent number
7,767,379
Issue date
Aug 3, 2010
Tokyo Ohka Kogyo Co., Ltd.
Takahiro Dazai
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...