Kyosuke HAYASHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,230,824
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD OF PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
- Publication number 20170186591
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Kyosuke Hayashi
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150179466
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Wataru TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS