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Kyoung Ha Kim
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Cupertino, CA, US
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Patents Grants
last 30 patents
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Patent Grant
PEALD titanium nitride with direct microwave plasma
Patent number
11,823,870
Issue date
Nov 21, 2023
Applied Materials, Inc.
Hanhong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ISOLATION MODULE FORMATION FOR BACKSIDE POWER DELIVERY APPLICATION
Publication number
20240379438
Publication date
Nov 14, 2024
Applied Materials, Inc.
Veeraraghavan S. Basker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
Publication number
20230253186
Publication date
Aug 10, 2023
Applied Materials, Inc.
Hanhong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
Publication number
20210050186
Publication date
Feb 18, 2021
Applied Materials, Inc.
Hanhong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...