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Patents Grants
last 30 patents
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Patent Grant
Pellicle including a water-soluble adhesive and photomask assembly...
Patent number
10,087,348
Issue date
Oct 2, 2018
Samsung Electronics Co., Ltd.
Byungchul Yoo
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Patents Applications
last 30 patents
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Patent Application
METHOD OF REMOVING AN ADHESIVE FOR AN EUV MASK AND METHOD OF REUSIN...
Publication number
20220380643
Publication date
Dec 1, 2022
FINE SEMITECH CORP.
Byungchul YOO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ADHESIVE FOR EUV MASK, CLEANING METHOD OF THE SAME, AND REUSING MET...
Publication number
20210032514
Publication date
Feb 4, 2021
FINE SEMITECH CORP.
Byungchul YOO
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PELLICLE INCLUDING A WATER-SOLUBLE ADHESIVE AND PHOTOMASK ASSEMBLY...
Publication number
20170088755
Publication date
Mar 30, 2017
Samsung Electronics Co., Ltd.
Byungchul YOO
B08 - CLEANING