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Seoul, KR
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last 30 patents
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Patent Grant
Method of through-etching substrate
Patent number
6,821,901
Issue date
Nov 23, 2004
Seung-jin Song
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method of through-etching substrate
Publication number
20030162402
Publication date
Aug 28, 2003
Seung-jin Song
B81 - MICRO-STRUCTURAL TECHNOLOGY