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Kyu-Hwan Shim
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Taejon, KR
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for perpendicular-type ultra vacuum chemical vapor deposi...
Patent number
6,752,874
Issue date
Jun 22, 2004
Electronics and Telecommunications Research Institute
Kyu-Hwan Shim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF induction plasma source generating apparatus
Patent number
6,073,578
Issue date
Jun 13, 2000
Electronics And Telecommunications Research Insitute
Kyu-Hwan Shim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Apparatus for perpendicular-type ultra vacuum chemical vapor deposi...
Publication number
20020056414
Publication date
May 16, 2002
Kyu-Hwan Shim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...