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Kyu Kab RHE
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Inspection method and apparatus, and lithographic apparatus
Patent number
9,927,717
Issue date
Mar 27, 2018
ASML Netherlands B.V.
Kyu Kab Rhe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
INSPECTION METHOD AND APPARATUS, AND LITHOGRAPHIC APPARATUS
Publication number
20160327870
Publication date
Nov 10, 2016
ASML NETHERLANDS B.V.
Kyu Kab RHE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY