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Kyung-Bo Sim
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Seoul, KR
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Patents Grants
last 30 patents
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Patent Grant
Control system for semiconductor processing apparatus
Patent number
7,225,039
Issue date
May 29, 2007
Samsung Electronics Co., Ltd.
Jae-Woo Chung
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Process error prevention method in semiconductor fabricating equipment
Patent number
6,766,210
Issue date
Jul 20, 2004
Samsung Electronics Co., Ltd.
Tae-Ha Jun
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
Control system for semiconductor processing apparatus
Publication number
20060178768
Publication date
Aug 10, 2006
Jae-Woo Chung
G05 - CONTROLLING REGULATING
Information
Patent Application
Process error prevention method in semiconductor fabricating equipment
Publication number
20030069660
Publication date
Apr 10, 2003
Tae-Ha Jun
G05 - CONTROLLING REGULATING