Kyung Chae YANG

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Anyang-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam etching apparatus
- Patent number 11,120,975
- Issue date Sep 14, 2021
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating plasma and apparatus for treating substrat...
- Patent number 10,784,082
- Issue date Sep 22, 2020
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR GENERATING PLASMA AND APPARATUS FOR TREATING SUBSTRAT...
- Publication number 20190252153
- Publication date Aug 15, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING APPARATUS
- Publication number 20190035610
- Publication date Jan 31, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS