Kyung-Jin Chu

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Substrate supporting unit, substrate processing apparatus, and meth...
- Patent number 10,622,228
- Issue date Apr 14, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20170110347
- Publication date Apr 20, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20160049317
- Publication date Feb 18, 2016
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20100319855
- Publication date Dec 23, 2010
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...