Kyungseok KO

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Gyeonggi-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Vertical heat treatment apparatus
- Patent number 10,968,515
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Eiji Kikama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming blocking silicon oxide film, and storage medium
- Patent number 10,964,530
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 10,781,515
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon oxide film on tungsten film
- Patent number 10,636,649
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Kyungseok Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming silicon oxide film, and storage me...
- Patent number 10,553,686
- Issue date Feb 4, 2020
- TOKYO ELECTRONC LIMITED
- Kyungseok Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film-Forming Method and Film-Forming Apparatus
- Publication number 20190271074
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Heat Treatment Apparatus
- Publication number 20190186014
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
- Publication number 20190131126
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...
- Publication number 20190080913
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM
- Publication number 20190043712
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...