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Kyungsik KANG
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Bucheon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Light source and extreme ultraviolet light source system using the...
Patent number
11,828,952
Issue date
Nov 28, 2023
Samsung Electronics Co., Ltd.
Dohyung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser beam delivery apparatus for extreme ultra violet light source
Patent number
11,778,719
Issue date
Oct 3, 2023
Samsung Electronics Co., Ltd.
Dohyung Kim
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet (EUV) collector inspection apparatus and method
Patent number
11,676,263
Issue date
Jun 13, 2023
Samsung Electronics Co., Ltd.
Dong-Hyub Lee
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET (EUV) COLLECTOR INSPECTION APPARATUS AND METHOD
Publication number
20220309643
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Dong-Hyub Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM USING THE...
Publication number
20220066225
Publication date
Mar 3, 2022
Samsung Electronics Co., Ltd.
Dohyung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER BEAM DELIVERY APPARATUS FOR EXTREME ULTRA VIOLET LIGHT SOURCE
Publication number
20210219408
Publication date
Jul 15, 2021
Samsung Electronics Co., Ltd.
Dohyung KIM
H01 - BASIC ELECTRIC ELEMENTS