Lai Seng Foo

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Real time monitoring of particulate contamination in a wafer proces...
- Patent number 7,248,975
- Issue date Jul 24, 2007
- TECH Semiconductor Singapore Pte Ltd.
- Khoon Peng Lim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Real time monitoring of particulate contamination in a wafer proces...
- Publication number 20070067117
- Publication date Mar 22, 2007
- TECH Semiconductor Singapore Pte. Ltd.
- Khoon Peng Lim
- H01 - BASIC ELECTRIC ELEMENTS