Lai-Wan CHONG

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Kaohsiung City, TW

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING CHEMICAL VAPOR DEPOSITION CHAMBER
- Publication number 20150361547
- Publication date Dec 17, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Min-Hui LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...