Laksh Karuppiah

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Feedback of layer thickness timing and clearance timing for polishi...
- Patent number 9,496,190
- Issue date Nov 15, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
GST film thickness monitoring
- Patent number 8,989,890
- Issue date Mar 24, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
FEEDBACK OF LAYER THICKNESS TIMING AND CLEARANCE TIMING FOR POLISHI...
- Publication number 20150194356
- Publication date Jul 9, 2015
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GST Film Thickness Monitoring
- Publication number 20100185314
- Publication date Jul 22, 2010
- APPLIED MATERIALS, INC.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR STABILIZED POLISHING PROCESS
- Publication number 20070062815
- Publication date Mar 22, 2007
- APPLIED MATERIALS, INC.
- Renhe Jia
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and composition for polishing a substrate
- Publication number 20060169674
- Publication date Aug 3, 2006
- Daxin Mao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR