Lakshmanan Senthil Kumar

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Erfurt, DE

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus comprising a plurality of individually contro...
- Patent number 11,003,090
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stefan Richter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20200166852
- Publication date May 28, 2020
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20170255110
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR