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Lakshminarayan Hariharan
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Glendora, CA, US
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last 30 patents
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Patent Grant
MEMS actuator device deployment
Patent number
8,941,192
Issue date
Jan 27, 2015
DigitalOptics Corporation MEMS
Robert J. Calvet
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS ACTUATOR DEVICE DEPLOYMENT
Publication number
20120081598
Publication date
Apr 5, 2012
DigitalOptics Corporation MEMS
Robert J. Calvet
B81 - MICRO-STRUCTURAL TECHNOLOGY