Lambertus Adrianus Van Den Wildenberg

Follow

Person

Geldrop, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Ex-situ removal of deposition on an optical element
- Patent number 7,372,058
- Issue date May 13, 2008
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Contamination barrier and lithographic apparatus comprising same
- Publication number 20070228290
- Publication date Oct 4, 2007
- ASML NETHERLANDS B.V.
- Lambertus Adrianus Wildenberg
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ex-situ removal of deposition on an optical element
- Publication number 20070069160
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Application
Lithographic apparatus, contaminant trap, and device manufacturing...
- Publication number 20070018118
- Publication date Jan 25, 2007
- ASML NETHERLANDS B.V.
- Leonid Aizikovitch Sjmaenok
- B82 - NANO-TECHNOLOGY