Lan-Chieh Shih

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Koougshiung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Epitaxial plasma enhanced chemical vapor deposition (PECVD) method...
- Patent number 6,818,533
- Issue date Nov 16, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Hsiung Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Epitaxial plasma enhanced chemical vapor deposition (PECVD) method...
- Publication number 20030211712
- Publication date Nov 13, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Hsiung Chen
- C30 - CRYSTAL GROWTH