Lana Chan

Person

Northborough, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,409,987
- Issue date Apr 2, 2013
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten for high aspect ratio...
- Patent number 8,409,985
- Issue date Apr 2, 2013
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving uniformity and adhesion of low resistivity tun...
- Patent number 8,329,576
- Issue date Dec 11, 2012
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for improving uniformity and resistivity of thin tungsten f...
- Patent number 8,101,521
- Issue date Jan 24, 2012
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,058,170
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten film
- Patent number 8,048,805
- Issue date Nov 1, 2011
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten for high aspect ratio...
- Patent number 7,955,972
- Issue date Jun 7, 2011
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving uniformity and adhesion of low resistivity tun...
- Patent number 7,772,114
- Issue date Aug 10, 2010
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for improving uniformity and resistivity of thin tungsten f...
- Patent number 7,655,567
- Issue date Feb 2, 2010
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten film
- Patent number 7,589,017
- Issue date Sep 15, 2009
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming low-resistivity tungsten interconnects
- Patent number 7,262,125
- Issue date Aug 28, 2007
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing tungsten film roughness and improving step cove...
- Patent number 7,141,494
- Issue date Nov 28, 2006
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF CONTROLLING TUNGSTEN FILM PROPERTIES
- Publication number 20120199887
- Publication date Aug 9, 2012
- Lana Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20120015518
- Publication date Jan 19, 2012
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...
- Publication number 20110223763
- Publication date Sep 15, 2011
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IMPROVING UNIFORMITY AND ADHESION OF LOW RESISTIVITY TUN...
- Publication number 20100273327
- Publication date Oct 28, 2010
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20100159694
- Publication date Jun 24, 2010
- NOVELLUS SYSTEMS INC.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FILM
- Publication number 20100035427
- Publication date Feb 11, 2010
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IMPROVING UNIFORMITY AND ADHESION OF LOW RESISTIVITY TUN...
- Publication number 20090149022
- Publication date Jun 11, 2009
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...
- Publication number 20080254623
- Publication date Oct 16, 2008
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for growing low-resistivity tungsten film
- Publication number 20080124926
- Publication date May 29, 2008
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for reducing tungsten film roughness and improving step cove...
- Publication number 20050031786
- Publication date Feb 10, 2005
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming low-resistivity tungsten interconnects
- Publication number 20040202786
- Publication date Oct 14, 2004
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method for depositing thin tungsten film with low resistivity and r...

Methods for growing low-resistivity tungsten for high aspect ratio...

Method for improving uniformity and adhesion of low resistivity tun...

Methods for improving uniformity and resistivity of thin tungsten f...

Method for depositing thin tungsten film with low resistivity and r...

Methods for growing low-resistivity tungsten film

Methods for growing low-resistivity tungsten for high aspect ratio...

Method for improving uniformity and adhesion of low resistivity tun...

Methods for improving uniformity and resistivity of thin tungsten f...

Methods for growing low-resistivity tungsten film

Method of forming low-resistivity tungsten interconnects

Method for reducing tungsten film roughness and improving step cove...

Patents Applicationslast 30 patents

METHODS OF CONTROLLING TUNGSTEN FILM PROPERTIES

METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...

METHOD FOR IMPROVING UNIFORMITY AND ADHESION OF LOW RESISTIVITY TUN...

METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FILM

METHOD FOR IMPROVING UNIFORMITY AND ADHESION OF LOW RESISTIVITY TUN...

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FOR HIGH ASPECT RATIO...

Methods for growing low-resistivity tungsten film

Method for reducing tungsten film roughness and improving step cove...

Method of forming low-resistivity tungsten interconnects