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Lanhua Wei
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology system calibration refinement
Patent number
10,605,722
Issue date
Mar 31, 2020
KLA-Tencor Corporation
Hidong Kwak
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system calibration refinement
Patent number
9,857,291
Issue date
Jan 2, 2018
KLA-Tencor Corporation
Hidong Kwak
G01 - MEASURING TESTING
Information
Patent Grant
Optical metrology with reduced sensitivity to grating anomalies
Patent number
9,470,639
Issue date
Oct 18, 2016
KLA-Tencor Corporation
Guorong V. Zhuang
G01 - MEASURING TESTING
Information
Patent Grant
Method for noise improvement in ellipsometers
Patent number
7,342,661
Issue date
Mar 11, 2008
Therma-Wave, Inc.
Martin Ebert
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspection equipment for semiconductor wafers with precleaning
Patent number
7,068,370
Issue date
Jun 27, 2006
Therma-Wave, Inc.
Allan Rosencwaig
G01 - MEASURING TESTING
Information
Patent Grant
Self-calibrating beam profile ellipsometer
Patent number
7,054,006
Issue date
May 30, 2006
Therma-Wave, Inc.
Haiming Wang
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspection equipment for semiconductor wafers with precleaning
Patent number
6,930,771
Issue date
Aug 16, 2005
Therma-Wave, Inc.
Allan Rosencwaig
G01 - MEASURING TESTING
Information
Patent Grant
Monitoring temperature and sample characteristics using a rotating...
Patent number
6,894,781
Issue date
May 17, 2005
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Small spot ellipsometer
Patent number
6,870,621
Issue date
Mar 22, 2005
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Spatial averaging technique for ellipsometry and reflectometry
Patent number
6,856,385
Issue date
Feb 15, 2005
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Small spot ellipsometer
Patent number
6,738,138
Issue date
May 18, 2004
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspection equipment for semiconductor wafers with precleaning
Patent number
6,714,300
Issue date
Mar 30, 2004
Therma-Wave, Inc.
Allan Rosencwaig
G01 - MEASURING TESTING
Information
Patent Grant
Combination thin-film stress and thickness measurement device
Patent number
6,608,689
Issue date
Aug 19, 2003
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Monitoring temperature and sample characteristics using a rotating...
Patent number
6,583,875
Issue date
Jun 24, 2003
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Spatial averaging technique for ellipsometry and reflectometry
Patent number
6,577,384
Issue date
Jun 10, 2003
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Small spot ellipsometer
Patent number
6,515,744
Issue date
Feb 4, 2003
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Spatial averaging technique for ellipsometry and reflectometry
Patent number
6,509,199
Issue date
Jan 21, 2003
Therma-Wave, Inc.
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Grant
Spatial averaging technique for ellipsometry and reflectometry
Patent number
6,281,027
Issue date
Aug 28, 2001
Lanhua Wei
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY SYSTEM CALIBRATION REFINEMENT
Publication number
20180100796
Publication date
Apr 12, 2018
KLA-Tencor Corporation
Hidong Kwak
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY SYSTEM CALIBRATION REFINEMENT
Publication number
20140340682
Publication date
Nov 20, 2014
Hidong Kwak
G01 - MEASURING TESTING
Information
Patent Application
Methods for eliminating artifacts in two-dimensional optical metrology
Publication number
20070076976
Publication date
Apr 5, 2007
Craig Uhrich
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for noise improvement in ellipsometers
Publication number
20060132773
Publication date
Jun 22, 2006
Martin Ebert
G01 - MEASURING TESTING
Information
Patent Application
Optical inspection equipment for semiconductor wafers with precleaning
Publication number
20050231719
Publication date
Oct 20, 2005
Allan Rosencwaig
G01 - MEASURING TESTING
Information
Patent Application
Self-calibrating beam profile ellipsometer
Publication number
20040233436
Publication date
Nov 25, 2004
Haiming Wang
G01 - MEASURING TESTING
Information
Patent Application
Small spot ellipsometer
Publication number
20040179199
Publication date
Sep 16, 2004
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Optical inspection equipment for semiconductor wafers with precleaning
Publication number
20040100633
Publication date
May 27, 2004
Allan Rosencwaig
G01 - MEASURING TESTING
Information
Patent Application
Spatial averaging technique for ellipsometry and reflectometry
Publication number
20030214654
Publication date
Nov 20, 2003
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Combination thin-film stress and thickness measurement device
Publication number
20030210394
Publication date
Nov 13, 2003
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Monitoring temperature and sample characteristics using a rotating...
Publication number
20030197864
Publication date
Oct 23, 2003
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Ellipsometer or reflectometer with elliptical aperture
Publication number
20030184750
Publication date
Oct 2, 2003
David M. Aikens
G01 - MEASURING TESTING
Information
Patent Application
Small spot ellipsometer
Publication number
20030117626
Publication date
Jun 26, 2003
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Small spot ellipsometer
Publication number
20020105647
Publication date
Aug 8, 2002
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Spatial averaging technique for ellipsometry and reflectometry
Publication number
20020045284
Publication date
Apr 18, 2002
Lanhua Wei
G01 - MEASURING TESTING
Information
Patent Application
Spatial averaging technique for ellipsometry and reflectometry
Publication number
20020012123
Publication date
Jan 31, 2002
Lanhua Wei
G01 - MEASURING TESTING