Larry E. Frisa

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Meiningen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing particles from a semiconductor processing tool
- Patent number 6,786,222
- Issue date Sep 7, 2004
- Motorola, Inc.
- Larry E. Frisa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for removing particles from a semiconductor processing tool
- Publication number 20040079385
- Publication date Apr 29, 2004
- Larry E. Frisa
- B08 - CLEANING