Larry Matthysse

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for flexible atomic layer deposition
- Patent number 6,905,547
- Issue date Jun 14, 2005
- Genus, Inc.
- Ana R. Londergan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD and CVD processes for WNx deposition
- Patent number 6,635,570
- Issue date Oct 21, 2003
- Carl J. Galewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vaporizer for atomic layer deposition system
- Publication number 20070042119
- Publication date Feb 22, 2007
- Larry Matthysse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...