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Larry Varnerin
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Pleasant Valley, NY, US
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last 30 patents
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Patent Grant
Sub-resolution sized assist features
Patent number
7,141,338
Issue date
Nov 28, 2006
Infineon Technologies AG
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Direct, non-destructive measurement of recess depth in a wafer
Patent number
6,708,559
Issue date
Mar 23, 2004
Infineon Technologies AG
Linda X. Chen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Wafer processing techniques with enhanced alignment
Publication number
20050059255
Publication date
Mar 17, 2005
Infineon Technologies North America Corp.
Lawrence John Varnerin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern transfer in device fabrication
Publication number
20040121264
Publication date
Jun 24, 2004
Bernhard Liegl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Sub-resolution sized assist features
Publication number
20040091790
Publication date
May 13, 2004
Infineon Technologies North America Corp.
Xiaochun Linda Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Direct, non-destructive measurement of recess depth in a wafer
Publication number
20030061890
Publication date
Apr 3, 2003
Infineon Technologies North America Corp.
Linda X. Chen
G01 - MEASURING TESTING