Lars Berger

Person

Heidenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Control device for actuating an actuator unit of a lithography syst...
- Patent number 10,983,443
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Stefan Krone
- G02 - OPTICS
Information Patent Grant
Component for a projection exposure apparatus
- Patent number 10,866,528
- Issue date Dec 15, 2020
- Carl Zeiss SMT GmbH
- Thomas Wolfsteiner
- G02 - OPTICS
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,444,633
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,437,155
- Issue date Oct 8, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Grant
Method for displacing at least one optical component
- Patent number 9,851,554
- Issue date Dec 26, 2017
- Carl Zeiss SMT GmbH
- Stefan Krone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE MEASURING DEVICE, LITHOGRAPHY APPARATUS AND METHOD FOR...
- Publication number 20240159600
- Publication date May 16, 2024
- Carl Zeiss SMT GMBH
- Lars Berger
- G01 - MEASURING TESTING
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230047921
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Michel Aliman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
COMPONENT FOR A PROJECTION EXPOSURE APPARATUS
- Publication number 20190324372
- Publication date Oct 24, 2019
- Carl Zeiss SMT GMBH
- Thomas Wolfsteiner
- G02 - OPTICS
Information Patent Application
CONTROL DEVICE FOR ACTUATING AN ACTUATOR UNIT OF A LITHOGRAPHY SYST...
- Publication number 20190302626
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067400
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067399
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DISPLACING AT LEAST ONE OPTICAL COMPONENT
- Publication number 20160320608
- Publication date Nov 3, 2016
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
- Publication number 20150185469
- Publication date Jul 2, 2015
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS

Lars Berger

Person

Patents Grantslast 30 patents

Control device for actuating an actuator unit of a lithography syst...

Component for a projection exposure apparatus

Sensor assembly and method for determining respective positions of...

Sensor assembly and method for determining respective positions of...

Method for displacing at least one optical component

Patents Applicationslast 30 patents

TEMPERATURE MEASURING DEVICE, LITHOGRAPHY APPARATUS AND METHOD FOR...

DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

COMPONENT FOR A PROJECTION EXPOSURE APPARATUS

CONTROL DEVICE FOR ACTUATING AN ACTUATOR UNIT OF A LITHOGRAPHY SYST...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

METHOD FOR DISPLACING AT LEAST ONE OPTICAL COMPONENT

METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT