Membership
Tour
Register
Log in
Lars Wischmeier
Follow
Person
Aalen, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Measurement illumination optical unit for guiding illumination ligh...
Patent number
11,720,028
Issue date
Aug 8, 2023
Carl Zeiss SMT GmbH
Thomas Fischer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for illuminating an object field of a projection exposure sy...
Patent number
10,409,167
Issue date
Sep 10, 2019
Carl Zeiss SMT GmbH
Martin Endres
G02 - OPTICS
Information
Patent Grant
Mirror array
Patent number
9,874,819
Issue date
Jan 23, 2018
Carl Zeiss SMT GmbH
Stig Bieling
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography system
Patent number
9,448,490
Issue date
Sep 20, 2016
Carl Zeiss SMT GmbH
Udo Dinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT ILLUMINATION OPTICAL UNIT FOR GUIDING ILLUMINATION LIGH...
Publication number
20220057717
Publication date
Feb 24, 2022
Carl Zeiss SMT GMBH
Thomas Fischer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SY...
Publication number
20160342094
Publication date
Nov 24, 2016
Carl Zeiss SMT GMBH
Martin Endres
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR ARRAY
Publication number
20160342095
Publication date
Nov 24, 2016
Carl Zeiss SMT GMBH
Stig Bieling
G02 - OPTICS
Information
Patent Application
EUV Lithography System
Publication number
20130265560
Publication date
Oct 10, 2013
Udo Dinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT OF AN IMAGING OPTICAL SYSTEM BY SUPERPOSITION OF PATTERNS
Publication number
20120249985
Publication date
Oct 4, 2012
Carl Zeiss SMT GMBH
Lars WISCHMEIER
G01 - MEASURING TESTING