Laura Ahmels

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Darmstadt, DE

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Patents Applicationslast 30 patents

Information Patent Application
METHOD, LITHOGRAPHY MASK, USE OF A LITHOGRAPHY MASK, AND PROCESSING...
- Publication number 20250208499
- Publication date Jun 26, 2025
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230305386
- Publication date Sep 28, 2023
- Carl Zeiss SMT GMBH
- Christian Felix Hermanns
- H01 - BASIC ELECTRIC ELEMENTS