Laura M. Matz

Person

Allentown, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical planarization (CMP) composition and methods the...
- Patent number 11,401,441
- Issue date Aug 2, 2022
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist cleaning composition used in photolithography and a met...
- Patent number 10,072,237
- Issue date Sep 11, 2018
- VERSUM MATERIALS US, LLC
- Randy Li-Kai Chang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Low K precursors providing superior integration attributes
- Patent number 9,018,107
- Issue date Apr 28, 2015
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric barrier deposition using nitrogen containing precursor
- Patent number 8,889,235
- Issue date Nov 18, 2014
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low k precursors providing superior integration attributes
- Patent number 8,753,986
- Issue date Jun 17, 2014
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric barrier deposition using oxygen containing precursor
- Patent number 8,637,396
- Issue date Jan 28, 2014
- Air Products and Chemicals, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming strontium titanate films
- Patent number 8,592,058
- Issue date Nov 26, 2013
- Intermolecular, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid composition containing aminoether for deposition of metal-co...
- Patent number 8,507,704
- Issue date Aug 13, 2013
- Air Products and Chemicals, Inc.
- Sergei Vladimirovich Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for depositing group 4 metal-containing films
- Patent number 8,471,049
- Issue date Jun 25, 2013
- Air Product and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for restoring dielectric properties
- Patent number 8,283,260
- Issue date Oct 9, 2012
- Air Products and Chemicals, Inc.
- Scott Jeffrey Weigel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming strontium titanate films
- Patent number 8,202,808
- Issue date Jun 19, 2012
- Intermolecular, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion to copper and copper electromigration resistance
- Patent number 8,043,976
- Issue date Oct 25, 2011
- Air Products and Chemicals, Inc.
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHARED DATA INDUCED QUALITY CONTROL SYSTEM FOR MATERIALS
- Publication number 20240184277
- Publication date Jun 6, 2024
- VERSUM MATERIALS US, LLC
- Safa Kutup KURT
- G05 - CONTROLLING REGULATING
Information Patent Application
SHARED DATA INDUCED PRODUCTION PROCESS IMPROVEMENT
- Publication number 20240177093
- Publication date May 30, 2024
- VERSUM MATERIALS US, LLC
- Safa Kutup KURT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Low Dishing Copper Chemical Mechanical Planarization
- Publication number 20220332978
- Publication date Oct 20, 2022
- VERSUM MATERIALS US, LLC
- KEH-YEUAN LI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical Mechanical Planarization (CMP) Composition and Methods The...
- Publication number 20190055430
- Publication date Feb 21, 2019
- VERSUM MATERIALS US, LLC
- Xiaobo Shi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Photoresist Cleaning Composition Used in Photolithography and a Met...
- Publication number 20170037344
- Publication date Feb 9, 2017
- Air Products and Chemicals, Inc.
- Randy Li-Kai Chang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Low K Precursors Providing Superior Integration Attributes
- Publication number 20140242813
- Publication date Aug 28, 2014
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming strontium titanate films
- Publication number 20130059066
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW K PRECURSORS PROVIDING SUPERIOR INTEGRATION ATTRIBUTES
- Publication number 20110308937
- Publication date Dec 22, 2011
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID COMPOSITION CONTAINING AMINOETHER FOR DEPOSITION OF METAL-CO...
- Publication number 20110212629
- Publication date Sep 1, 2011
- Air Products and Chemicals, Inc.
- Sergei Vladimirovich Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Strontium Titanate Films
- Publication number 20110027960
- Publication date Feb 3, 2011
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Strontium Titanate Films
- Publication number 20110027617
- Publication date Feb 3, 2011
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric Barrier Deposition Using Nitrogen Containing Precursor
- Publication number 20100291321
- Publication date Nov 18, 2010
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for Depositing Group 4 Metal-Containing Films
- Publication number 20100143607
- Publication date Jun 10, 2010
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric Barrier Deposition Using Oxygen Containing Precursor
- Publication number 20100136789
- Publication date Jun 3, 2010
- Air Products and Chemicals, Inc.
- Laura M. Matz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process For Restoring Dielectric Properties
- Publication number 20100041234
- Publication date Feb 18, 2010
- Air Products and Chemicals, Inc.
- Scott Jeffrey Weigel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adhesion to Copper and Copper Electromigration Resistance
- Publication number 20090236745
- Publication date Sep 24, 2009
- Air Products and Chemicals, Inc.
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Laura M. Matz

Person

Patents Grantslast 30 patents

Chemical mechanical planarization (CMP) composition and methods the...

Photoresist cleaning composition used in photolithography and a met...

Low K precursors providing superior integration attributes

Dielectric barrier deposition using nitrogen containing precursor

Low k precursors providing superior integration attributes

Dielectric barrier deposition using oxygen containing precursor

Methods of forming strontium titanate films

Liquid composition containing aminoether for deposition of metal-co...

Precursors for depositing group 4 metal-containing films

Process for restoring dielectric properties

Methods of forming strontium titanate films

Adhesion to copper and copper electromigration resistance

Patents Applicationslast 30 patents

SHARED DATA INDUCED QUALITY CONTROL SYSTEM FOR MATERIALS

SHARED DATA INDUCED PRODUCTION PROCESS IMPROVEMENT

Low Dishing Copper Chemical Mechanical Planarization

Chemical Mechanical Planarization (CMP) Composition and Methods The...

Photoresist Cleaning Composition Used in Photolithography and a Met...

Low K Precursors Providing Superior Integration Attributes

Method of forming strontium titanate films

LOW K PRECURSORS PROVIDING SUPERIOR INTEGRATION ATTRIBUTES

LIQUID COMPOSITION CONTAINING AMINOETHER FOR DEPOSITION OF METAL-CO...

Methods of Forming Strontium Titanate Films

Methods of Forming Strontium Titanate Films

Dielectric Barrier Deposition Using Nitrogen Containing Precursor

Precursors for Depositing Group 4 Metal-Containing Films

Dielectric Barrier Deposition Using Oxygen Containing Precursor

Process For Restoring Dielectric Properties

Adhesion to Copper and Copper Electromigration Resistance