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Patent Grant
Nitrogen-plasma surface treatment in a direct bonding method
Patent number
8,318,586
Issue date
Nov 27, 2012
Commissariat a l'Energie Atomique et Aux Energies Alternatives
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H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
NITROGEN-PLASMA SURFACE TREATMENT IN A DIRECT BONDING METHOD
Publication number
20110129986
Publication date
Jun 2, 2011
Laure Libralesso
H01 - BASIC ELECTRIC ELEMENTS