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Laurence D. Schultz
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Richardson, TX, US
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last 30 patents
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Patent Grant
Versatile system for conditioning slurry in CMP process
Patent number
7,695,589
Issue date
Apr 13, 2010
Texas Instruments Incorporated
David A. Stark
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
VERSATILE SYSTEM FOR CONDITIONING SLURRY IN CMP PROCESS
Publication number
20060276042
Publication date
Dec 7, 2006
TEXAS INSTRUMENTS INCORPORATED
David A. Stark
B24 - GRINDING POLISHING
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Patent Application
Versatile system for conditioning slurry in CMP process
Publication number
20060026906
Publication date
Feb 9, 2006
David A. Stark
B24 - GRINDING POLISHING