Laurent Khuat Duy

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Level sensor, a method for determining a height map of a substrate...
- Patent number 9,488,465
- Issue date Nov 8, 2016
- ASML Netherlands B.V.
- Laurent Khuat Duy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method, lithographic apparatus and lithogr...
- Patent number 9,081,302
- Issue date Jul 14, 2015
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Level sensor, lithographic apparatus, and substrate surface positio...
- Patent number 8,675,210
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Self-referencing interferometer, alignment system, and lithographic...
- Patent number 8,610,898
- Issue date Dec 17, 2013
- ASML Netherlands B.V.
- Laurent Khuat Duy
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and method of...
- Patent number 8,570,487
- Issue date Oct 29, 2013
- ASML Netherlands B.V.
- Laurent Khuat Duy
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Level Sensor, a Method for Determining a Height Map of a Substrate,...
- Publication number 20130128247
- Publication date May 23, 2013
- ASML NETHERLANDS B.V.
- Laurent KHUAT DUY
- G01 - MEASURING TESTING
Information Patent Application
LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...
- Publication number 20130077079
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus and Method, Lithographic Apparatus and Lithogr...
- Publication number 20120075601
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
SELF-REFERENCING INTERFEROMETER, ALIGNMENT SYSTEM, AND LITHOGRAPHIC...
- Publication number 20120057171
- Publication date Mar 8, 2012
- ASML NETHERLANDS B.V.
- Laurent KHUAT DUY
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...
- Publication number 20120058434
- Publication date Mar 8, 2012
- ASML NETHERLANDS B.V.
- Laurent KHUAT DUY
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100231881
- Publication date Sep 16, 2010
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING