Laurent Marinier

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Leuven, BE

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Patents Grantslast 30 patents

Information Patent Grant
Removable pellicle for immersion lithography
- Patent number 8,067,147
- Issue date Nov 29, 2011
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Removable pellicle for immersion lithography
- Publication number 20070064215
- Publication date Mar 22, 2007
- Koninklijke Philips Electronic, N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY