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Saint Martin le Vinoux, FR
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last 30 patents
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Patent Grant
Methods and apparatus for co-sputtering multiple targets
Patent number
11,101,117
Issue date
Aug 24, 2021
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for co-sputtering multiple targets
Patent number
10,468,238
Issue date
Nov 5, 2019
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
Publication number
20200013597
Publication date
Jan 9, 2020
Applied Materials, Inc.
Anantha K. SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
Publication number
20170053784
Publication date
Feb 23, 2017
Applied Materials, Inc.
Anantha K. SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...